The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2001
Filed:
Jan. 29, 1999
Eiichi Shirakawa, Kumamoto, JP;
Tokyo Electron Ltd., , JP;
Abstract
A heat processing apparatus comprises a heating section having a hot plate for heating a substrate in a heat conduction manner, refrigeration medium for decreasing temperature of the hot plate in a heat exchange manner by bring the refrigeration medium in direct or indirect contact with the hot plate, a refrigeration section for storing the refrigeration medium while cooling, a transport mechanism for taking out the refrigerant from the refrigeration section, transporting the refrigeration medium to the heating section, mounting the refrigeration medium on the hot plate, picking up the refrigeration medium from the hot plate, taking out the refrigeration medium from the heating section, and transporting the refrigeration medium to the refrigeration section, setting mechanism for setting a heat processing temperature for the substrate, and a controller for controlling temperature of the hot plate by using the refrigeration medium so as to reach the heat processing temperature set by the setting mechanism.