The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2001
Filed:
Jan. 21, 2000
Sunil Wickramanayaka, Tokyo, JP;
Anelva Corporation, Fuchu, JP;
Abstract
A plasma processing reactor includes a helical resonator including a top plate and a helical coil, the helical coil is made of a metal with a length of &lgr;/4, wherein n is an integer and &lgr; is a wavelength of rf frequency applied to the helical coil. The reactor also includes a plasma process chamber including a wafer holder arranged at a lower position therein and a wafer to be processed is loaded on the wafer holder. The helical resonator has a vertical bar for introducing a gas, the vertical bar is fixed to the top plate of the helical resonator and is connected to a gas inlet port. A partition wall separates the helical resonator and the plasma process chamber. The partition wall includes an outer metal ring, a circular central metal plate, and a doughnut-shaped dielectric plate between the outer metal ring and the central metal plate, the doughnut-shaped dielectric plate having an inner diameter and an outer diameter. The central metal plate is fixed to the top plate using the vertical bar and includes a gas reservoir and a plurality of gas inlet ports. The helical coil is placed around the vertical bar, and the helical coil has a diameter that is greater than the inner diameter of the doughnut-shaped dielectric plate and is smaller than the outer diameter of the doughnut-shaped dielectric plate.