The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2001
Filed:
May. 28, 1999
Aaron L. Frank, Orlando, FL (US);
Jennifer S. Obeng, Orlando, FL (US);
Yaw S. Obeng, Orlando, FL (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
The present invention provides an electrolytic cell for use in a process for real time monitoring of a chemical bath used in the fabrication of a semiconductor wafer and having different metal ions therein. In one embodiment, the electrolytic cell comprises a fluid chamber having an inlet, an outlet and chamber walls, and channel electrodes coupled to the chamber walls. The inlet and outlet permit a throughflow of at least of a portion of the chemical bath. Each of the channel electrodes corresponds to one of the different metal ions. Each channel electrode is energized to a detection potential selected to provide electrical conduction when the corresponding different metal ion reaches a prescribed concentration.