The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2001
Filed:
Jul. 02, 1998
Kandiah Shivanandan, Bethesda, MD (US);
Institute of Microelectronics, Singapore, SG;
Abstract
A multiwavelength imaging and spectroscopic photoemission microscope system (,) which simultaneously provides images in a broad range of the electromagnetic spectrum, such as between 200 nm-1000 nm (optical or visible light) and 1000 nm-500 nm (infrared light). The multiwavelength imaging and spectroscopic photoemission microscope system comprises a microscope (,), a spectrometer (,), a beam splitter (,), a first spectrum focal plane array (,) including an appropriate photodiode (,A), a second spectrum focal plane array (,) including an appropriate photodiode (,B), and a cryogenic vessel (,) to maintain relevant portions of the system at a very low temperature. The invention may be used in failure analysis of integrated circuits and in semiconductor and low temperature physics.