The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2001
Filed:
Sep. 05, 2000
Shinobu Atsumi, Ota-ku, JP;
Masato Hamatani, Kounosu, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A laser apparatus comprises a plurality of laser beam sources which use, as laser media, mixed gases containing at least one common gas component; at least one common gas supply source for supplying, to the respective laser beam sources, the common gas component for constituting the mixed gases; and one or more gas flow amount-adjusting units for adjusting flow amounts of the common gas component supplied from the common gas supply source and other gas components for constituting the mixed gases so that the gas components are supplied to the respective gas laser beam sources. It is unnecessary to provide gas tanks for each of the laser beam sources. The arrangement of the gas supply equipment is simplified, and the safety is improved. A plurality of the laser apparatuses are preferably installed to a circuit element production line provided with a plurality of exposure apparatuses.