The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2001
Filed:
Jan. 14, 2000
W. T. Chen, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
An apparatus and a method for detecting ignited flammable gas in a conduit or for detecting the impurity content of a gas composition are described. In the apparatus, a sensor body is provided which is equipped with at least one perforated isolator plate for slowing down the flow of an ignited flammable gas when fed back into the cavity of the detection apparatus. The sensor body further includes at least one optical sensor mounted juxtaposed to a gas inlet for sensing an ignited flammable gas and for sending a signal to a controller for shutting off the flammable gas supply. The present invention novel apparatus can further be utilized to detect the impurity level in a gas composition, and to detect any reaction product between a flammable gas and a material that forms the chamber component.