The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2001
Filed:
Mar. 11, 1999
Applicant:
Inventor:
David Yeh, Taipei, TW;
Assignee:
United Silicon Incorporated, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16M 1/300 ; E04B 1/98 ;
U.S. Cl.
CPC ...
F16M 1/300 ; E04B 1/98 ;
Abstract
A vibration damper is described. A vibration damper with a high dampening ability is required for a scanner because of the requirement of the 0.18 &mgr;m size devices. The vibration damper is placed between a machine and a floor. The vibration damper has an I-shaped girder structure and a material filling the space between the floor and I-shaped girder structure. A support element having two layers of latticed armatures is mounted on the I-shaped girder structure. The support element is filled with cement. A layer of vibration absorber is placed on the cement.