The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2001
Filed:
Jan. 06, 2000
Robert J. Bailey, Santa Cruz, CA (US);
Lisa H. Michael, Palo Alto, CA (US);
Thomas E. Kane, Santa Cruz, CA (US);
Silicon Valley Group Thermal System LLC, Scotts Valley, CA (US);
Abstract
A chemical vapor deposition (CVD) system is provided for processing a substrate,. The system,includes a heated muffle,, a chamber,having an injector assembly,for introducing chemical vapor to process the substrate,, and a belt,for moving the substrate through the muffle and chamber. The belt,has an oxidation-resistant coating,to reduce formation of deposits thereon. The coating,is particularly useful for resisting formation of chromium oxides on belts made from a chromium-containing alloy. In one embodiment, the oxidation-resistant coating,comprises a securely-adhered oxide layer,that is substantially free of transition metals. Preferably, the oxidation-resistant coating,comprises aluminum oxide. More preferably, the coating,comprises an aluminum oxide layer,securely adhered over a nickel aluminide layer