The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2001
Filed:
Jun. 01, 1999
Toshihiro Yonezawa, Kitakoma-gun, JP;
Hiroshi Tsukada, Kitakoma-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A vacuum coupling system according to the present invention is a mechanism that is used accurately to position and connect a vacuum coupling to a valve mechanism of a shell, which is formed by integrally attracting a wafer and a contactor to a wafer chuck by vacuum suction, in conducting a reliability test or other tests on IC chips that is formed on the wafer. This system comprises an air cylinder for advancing the vacuum coupling toward the valve mechanism, a positioning member to be advanced together with the vacuum coupling, a guide member for guiding the vacuum coupling to the valve mechanism in cooperation with the positioning member, a guide rail for guiding the around the wafer chuck while the positioning member is advancing, and a pair of POGO pins for returning the air cylinder to its neutral position.