The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2001
Filed:
Jul. 14, 1999
Jung-Chao Chiou, Hsin-Chu, TW;
Chuan-Fu Wang, San-Chung, TW;
United Microelectronics Corp., Hsin-Chu, TW;
Abstract
A method of forming a capacitor for a dynamic random access memory (DRAM) cell using a selective hemispherical grain (s-HSG) structure after the removal of SiON by phosphoric acid (H,PO,) is disclosed. The method includes: Providing a semiconductor substrate having a semiconductor structure formed thereon; forming an interlayer dielectric layer over the semiconductor structure; patterning the interlayer dielectric layer; depositing an amorphous-silicon (a-Si) layer over the interlayer dielectric layer; depositing a SiON layer on the a-Si layer; patterning the SiON layer and the a-Si layer layer; removing the SiON layer by H,PO,wet etching; forming a s-HSG silicon layer over the patterned a-Si layer; depositing a conformal interpoly dielectric layer along a surface of the resulting structure; and finally forming a polysilicon layer over the interpoly dielectric layer.