The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2001
Filed:
Aug. 26, 1999
Ser Wee Quek, Bedok, SG;
Chartered Semiconductor Manufacturing Ltd., Singapore, SG;
Abstract
An apparatus for removably positioning a semiconductor wafer for polishing. The apparatus including a rotating member with a major lower surface having a plurality of recesses each with a conduit path radially leading to a smaller circular pattern of portholes disposed near the center of the rotating member, the recesses are arranged in concentric segments. A nozzle plate covers the major lower surface defining a plurality of chambers therebetween. The nozzle plate includes a radial pattern of gas dispensing orifices which are aligned centrally relative to each chamber. A preset regulated gas pressure communicates with each orifice pattern to exert an opposing force against a force urging the article against the polishing pad. At least two of the orifice patterns have gas pressures adjusted independently from one another so that independent pressure control creates varying forces to be exerted against the back side of the wafer.