The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2001
Filed:
Dec. 09, 1999
W. T. Chen, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, LTD, Hsin Chu, TW;
Abstract
An apparatus and a method for stopping the propagation of an ignited flammable gas in a conduit used in semiconductor processing are proposed and described. In the apparatus, a mounting mechanism and a bullet are provided inside an elongated conduit body wherein the bullet is detachably mounted to the mounting means, while the mounting mechanism is fixedly attached to an inside wall of the elongated conduit body. The bullet is equipped with an explosive pack in a body portion and a bullet head in a head portion. When a flame from an ignited flammable gas enters the conduit and ignites the explosive pack, the bullet is propelled into and frictionally engaging the inlet end of the conduit body such that an internal passageway in the inlet end is substantially blocked to prevent the further propagation of flame upstream into the conduit. The bullet utilized in the present invention novel apparatus may be suitably supplied with a tapered body such that the tapered surface advantageously engages the internal passageway in the inlet end of the conduit body when the bullet is by the explosion of an explosive pack toward the inlet end.