The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2001
Filed:
Dec. 08, 1998
Bruce L. Hayes, Boise, ID (US);
Mark V. Peckham, Meridian, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
An apparatus including a dispense line, a solvent line, and a solvent vapor bath having a purge section is disclosed. The purge section of the apparatus has a cleaning member disposed therein containing at least one dispense hole corresponding to the dispense line. The purge section contains a plurality of ports to receive the dispense line and the solvent line. The solvent line is directed toward the cleaning member when the dispense line extends through the dispense hole. A method of cleaning a dispense line is also disclosed. In the method, a solvent vapor bath comprising a purge region having a cleaning member disposed therein and containing at least one dispense hole is provided. The purge region contains a plurality of ports to receive the dispense line and a solvent line, the solvent line being directed toward the cleaning member when the at least one dispense line extends through the at least one dispense hole. The method includes disposing the dispense line through one of the ports of the purge region and the dispense hole of the cleaning member, disposing a solvent dispense line through one of the ports of the purge region, and dispensing solvent from the solvent dispense line toward the cleaning member.