The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2001
Filed:
Oct. 26, 1999
Applicant:
Inventor:
Norio Hirashita, Tokyo, JP;
Assignee:
OKI Electric Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
In a semiconductor manufacturing apparatus, a semiconductor substrate ion-implanted with an ion species is heated and thereby raised in temperature under vacuum. At this time, a partial pressure of a gas released from the semiconductor substrate is measured by a quadrupole mass spectrometer. Further, a change in partial pressure with time is observed and compared with a pre-measured release characteristic, whereby the temperature of the semiconductor substrate is corrected.