The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2001
Filed:
May. 22, 2000
Applicant:
Inventor:
Nai-Cheng Lu, Hsin-Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 1/304 ; H01J 1/924 ;
U.S. Cl.
CPC ...
H01J 1/304 ; H01J 1/924 ;
Abstract
A micro vacuum tube includes a disk (,) having an axis and formed of successive planar layers of a first conductive layer (,), a first dielectric layer (,), a second conductive layer (,), and a second dielectric layer(,), a hole along the axis of the cylinder extends through the first dielectric layer (,), the second conductive layer (,), and the second dielectric layer (,), a cusp shaped microtip (,) centrally located over, and extending into, the hole is separated from and supported by, a pole (,) that rests on the second dielectric layer, and a cap (,) seals the microtip, the pole (,) and the hole in a permanent vacuum environment.