The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2001
Filed:
Nov. 16, 1999
Applicant:
Inventors:
Shahriar Naghshineh, Allentown, PA (US);
Jeff Barnes, Bath, PA (US);
Yassaman Hashemi, Allentown, PA (US);
Ewa B. Oldak, Bethlehem, PA (US);
Assignee:
ESC, Inc., Bethlehem, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/26 ; C11D 7/32 ; C11D 3/30 ;
U.S. Cl.
CPC ...
C11D 7/26 ; C11D 7/32 ; C11D 3/30 ;
Abstract
A cleaning solution is provided for cleaning copper-containing microelectronic substrates, particularly for post-CMP or Via formation cleaning. The cleaning solution comprises a quaternary ammonium hydroxide, an organic amine, a corrosion inhibitor, and water. A preferred cleaning solution comprises tetramethylammonium hydroxide, monoethanolamine, gallic acid, and water. The pH of the cleaning solution is greater than 10.