The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2001
Filed:
Sep. 03, 1998
Mosel Vitelic Incorporated, Hsin-Chu, TW;
Abstract
The present invention relates to a method for actually measuring misalignment of a via. According to the invention, a via is formed by etching an inter metal dielectric (IMD) layer using a photoresist with a via pattern as a mask so that via pattern can be accurately transferred to the inter metal dielectric layer. Then a patterned metal interconnection line underlying the inter metal dielectric layer is etched using the patterned inter metal dielectric layer as a mask and followed by a process of stripping the inter metal dielectric layer. After that, an actual misalignment can be detected by measuring relative distance between the patterned metal interconnection line and the via thereon through Scanning Electron Microscopy (SEM), by which overlay specifications for OSI instrument can be verified and adjusted.