The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2001
Filed:
May. 24, 1999
Applicant:
Inventor:
John Oshinowo, Schlaitdorf, DE;
Assignee:
STEAG MicroTech GmbH, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 ; B08B 1/300 ;
U.S. Cl.
CPC ...
B08B 3/12 ; B08B 1/300 ;
Abstract
An apparatus for processing substrates is provided. The apparatus includes a receptacle for containing processing fluid, and at least one substrate support. Components of the receptacle and/or substrate support that come into contact with processing fluid have a protective layer. Guide or support members for the substrates are fused to the protective layer.