The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2001
Filed:
Nov. 03, 1997
Applicant:
Inventors:
Martin Schlott, Hanau am Main, DE;
Wolfgang Dauth, Frankfurt am Main, DE;
Martin Kutzner, Neuberg, DE;
Bruce Gehman, Morgan Hill, CA (US);
Shawn Vahlstrom, Morgan Hill, CA (US);
Assignee:
Leybold Material GmbH, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 3/5457 ;
U.S. Cl.
CPC ...
C04B 3/5457 ;
Abstract
An indium oxide/tin oxide powder with 5-15 wt. % tin oxide is subjected to an annealing treatment at T≧1, 000° C. and is then partially reduced and subjected to hot isostatic pressing to produce a sputtering target with a density of at least 95% of the theoretical density and a thermal conductivity of at least 14 Wm,K,.