The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 06, 2001

Filed:

Feb. 24, 1997
Applicant:
Inventor:

Kazunari Suga, Gyoda, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/04 ;
U.S. Cl.
CPC ...
G01R 1/04 ;
Abstract

A main frame of an IC testing apparatus is formed in the shape of a horizontally elongated box with its height close to the height of wafer probers. Two wafer probers are arranged side by side transversely of the main frame on the front said thereof. One rotary drive is equipped with two output shafts which are connected via respective clutches with the rotary drive, and the testing heads are connected to the associated output shafts. The rotary drive is disposed on the top of the main frame with an extension of the upper portion of the rotary drive, and is adapted to rotatively drive the testing heads connected to the output shifts between a fist position opposing the contact section of the associated wafer prober and a second position over the top of the main frame. This construction reduces the installation areas for each of the wafer probers as well as narrowing the space between the wafer probers and the main frame.


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