The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 06, 2001

Filed:

Jul. 14, 1998
Applicant:
Inventors:

Peter A. Dowben, Crete, NE (US);

Carlo Waldfried, Arlington, VA (US);

Tara J. McAvoy, Santa Barbara, CA (US);

David N. McIlroy, Moscow, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 4/948 ;
U.S. Cl.
CPC ...
H01J 4/948 ;
Abstract

Disclosed is a compact, small diameter, high resolution charged particle-energy detecting, retractable cylindrical mirror analyzer system. Multiple sequential stages enable charged particle-energy detection with an improved resolution as compared to that possible where only a single stage is utilized. The relatively small size allows for positioning, via a manipulator of the cylindrical mirror analyzer system, which is attached to a linear motion feedthrough mounted on a conflat flange of a vacuum system.


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