The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2001
Filed:
May. 27, 1997
Applicant:
Inventors:
Kazuo Watanabe, Omiya, JP;
Akifumi Mishima, Omiya, JP;
Assignee:
Mitsubishi Materials Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; B22F 3/10 ;
U.S. Cl.
CPC ...
C23C 1/434 ; B22F 3/10 ;
Abstract
A dielectric sputtering target of high strength comprising a sintered barium, strontium titanate body, which is oxygen deficient, of the formula: Ba,Sr,TiO,, wherein 0<x<1 and 0<y≦0.03, the sintered body having a mean grain size of 0.3 to 5 &mgr;m, a maximum grain size of 20 &mgr;m or less, a relative density of 95% to 99%, a purity of 4N or more, a K content of 1 ppm or less, a Na content of 2 ppm or less, an Al content of 5 ppm or less, a Si content of 20 ppm or less, an Fe content of 2 ppm or less and a mean flexural strength of 150 MPa or more.