The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2001
Filed:
Jul. 15, 1997
Applicant:
Inventors:
Dennis M. Adderton, Santa Barbara, CA (US);
Virgil B. Elings, Santa Barbara, CA (US);
Assignee:
Veeco Instruments Inc., Plainview, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 2/912 ;
U.S. Cl.
CPC ...
G01R 2/912 ;
Abstract
A surface of the sample is scanned in intermittent contact mode with an the AFM. The probe tip is electrically conductive and is electrically connected to a capacitance sensing circuit. The oscillation of the AFM probe modulates capacitance between probe tip and sample surface. The modulated capacitance is demodulated to yield the capacitance properties of the sample.