The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2001
Filed:
Sep. 14, 1998
Applicant:
Inventors:
Mindi Xu, Naperville, IL (US);
Weiching Li, Chicago, IL (US);
Assignee:
American Air Liquide Inc., Walnut Creek, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/300 ;
U.S. Cl.
CPC ...
B08B 1/300 ;
Abstract
Provided are a method and apparatus for measuring particles in a liquid sample. The method involves introducing a liquid sample into a heat exchanger, thereby cooling the sample to a predetermined temperature. A particle measurement is performed on the cooled sample by introducing the cooled sample into a particle detector. The method and apparatus in accordance with the invention effectively suppress bubbles present in a liquid chemical sample being measured, thereby allowing for accurate particle measurements. The invention has particular applicability in the semiconductor and pharmaceutical manufacturing industries.