The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2001
Filed:
Jan. 20, 1999
Applicant:
Inventors:
Marina G. Medvedeva, Moscow, RU;
Ranko Scepanovic, San Jose, CA (US);
Dusan Petranovic, Cupertino, CA (US);
Assignee:
LSI Logic Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 ; G03F 3/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ; G03F 3/00 ;
Abstract
An aerial image produced by a mask having transmissive portions is simulated by dividing the transmissive portions of the mask into primitive elements and obtaining a spatial frequency function corresponding to each of the primitive elements. The spatial frequency functions corresponding to the primitive elements are combined to obtain a transformed mask transmission function, and the transformed mask transmission function is utilized to generate a simulation of the aerial image.