The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2001
Filed:
May. 04, 1998
Hiroshi Amemiya, Yamanashi-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A low-temperature wafer testing method and a prober therefor are disclosed. The prober includes a main chuck equipped to cool an object to be tested to a low temperature, a prober chamber, a probe card with probes, a ring-like member for supporting the probe card, and a plate provided for the ring-like member on an outer side of the probe card. The wafer placed on the main chuck is cooled initially. Then, dry gas which does not condense at the cooled temperature is supplied to a prober chamber. Gas in a space, defined by the ring-like member between the probe card and the plate, is replaced with the dry gas. With replacement by the dry gas, even if the gas in the space leaks into the prober chamber during a low-temperature test, condensing or icing on the wafer can be prevented.