The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2000
Filed:
Oct. 07, 1999
Applicant:
Inventors:
Hiroshi Nomura, Kawasaki, JP;
Takuya Kouno, Yokkaichi, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356401 ;
Abstract
In an alignment apparatus, an alignment mark formed on a substrate is illuminated through an illuminating optical system, and an image of the alignment mark is projected onto a light receiving surface of a CCD camera through an enlarging optical system. The enlarging optical system includes a parallel flat plate, the inclination of which can be adjustable, for parallel-translating an eccentric component of coma.