The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2000
Filed:
Apr. 18, 1997
Applicant:
Inventors:
Seok Keun Koh, Seoul, KR;
Hyung Jin Jung, Seoul, KR;
Won Kook Choi, Seoul, KR;
Yong Bai Son, Seoul, KR;
Assignee:
Korea Institute of Science and Technology, Seoul, KR;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ; H05H / ;
U.S. Cl.
CPC ...
427529 ; 427530 ; 427533 ; 20419217 ;
Abstract
A process for modifying a nitride surface includes irradiating energized ion particles onto the nitride surface while blowing a reactive gas directly on the nitride surface under a vacuum condition. An aluminum nitride for a direct bond copper (DBC) can be obtained by forming a thin copper film on the thusly modified nitride.