The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 12, 2000

Filed:

Jul. 19, 1999
Applicant:
Inventors:

Joseph R Flemish, Westfield, NJ (US);

Honghua Du, Mapelwood, NJ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C04B / ; B23K / ;
U.S. Cl.
CPC ...
501 88 ; 264673 ; 264682 ; 21912159 ; 219158 ; 219420 ; 373122 ; 373163 ;
Abstract

A method and crucible for annealing SiC at high temperatures. The crucible s a vessel having a peripheral wall, at least two compartments separated by an inner wall within the peripheral wall and a lid which separates the compartments from the crucible surroundings while providing a passageway between the compartments. The peripheral wall, inner wall and lid are composed of materials capable of withstanding annealing temperatures. The process disposes an SiC wafer in one of the compartments and SiC powder disposed in another of the compartments. The SiC powder is present to hinder SiC wafer decomposition during annealing of the SiC wafer. The crucible is then heated to a temperature sufficient anneal the SiC wafer, preferably after evacuating air and flowing an inert gas in and around the crucible.


Find Patent Forward Citations

Flemish, Joseph. (2000). Method of annealing silicon carbide for activation of ion-implanted (U.S. Patent No. 6159884). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6159884

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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