The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2000
Filed:
Feb. 18, 1999
Hiromi Ohtsuka, Kurume, JP;
Kazuhisa Matsumoto, Tosu, JP;
Tokyo Electron Limited, , JP;
Abstract
In a wafer transport chuck 10 for holding wafers W by means of a pair of holding members 11, each of the holding members 11 has an upper holding portion 12 and a lower holding portion 13 which project from the upper and lower portions of a surface facing another holding member 11, respectively. Each of the upper holding portion 12 and the lower holding portion 13 has a circular arc surface facing the held portions of the wafers W. The upper holding portion 12 has a plurality of upper holding grooves 12a, and the lower holding portion 13 has a plurality of lower holding grooves 13a. Thus, it is possible to make the substrate holder smaller without reducing the strength thereof, and it is possible to improve the cleaning and drying efficiency, so that it is possible to reduce cleaning and drying time and to improve throughput.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile