The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2000
Filed:
Nov. 04, 1998
Applicant:
Inventor:
Stephen W Into, Harvard, MA (US);
Assignee:
Schlumberger Technologies, Inc., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 250306 ; 250307 ; 2502521 ;
Abstract
The shape of a sample is determined with a scanning electron microscope ('SEM') by using electron emission from a surface to measure its slope. A surface of a sample is placed in the SEM's electron beam for several known angles, and respective measurements of the electron emission are obtained. A relationship between surface angle and electron emission is derived for the sample from the measurements. Then, as the electron beam is scanned along the surface to measure electron emission, this derived relationship is used to obtain the slope at each scanning point.