The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2000
Filed:
Jun. 04, 1997
Applicant:
Inventors:
Roland Rupp, Lauf, DE;
Johannes Voelkl, Erlangen, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118715 ; 118724 ; 118725 ; 118620 ;
Abstract
A device for treating at least one substrate comprises a susceptor that is thermally coupled to the substrate and an induction-heating device for heating the susceptor. The induction-heating device and the susceptor are so disposed with respect to one another that an electromagnetic force acting on the susceptor is directed parallel to the force of gravity. As a result, a mechanically and thermally stable structure is assured.
Rupp, Roland. (2000). Device for treating a substrate (U.S. Patent No. 6153012). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6153012
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile