The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2000
Filed:
May. 05, 1999
Minekazu Sakai, Kariya, JP;
Yukihiro Takeuchi, Nishikamo-gun, JP;
Kazuhiko Kano, Toyoake, JP;
Seiji Fujino, Toyota, JP;
Tsuyoshi Fukada, Aichi-gun, JP;
Hiroshige Sugito, Nagoya, JP;
Minoru Murata, Kariya, JP;
Hiroshi Muto, Nagoya, JP;
Hirofumi Higuchi, Okazaki, JP;
Kenichi Ao, Tokai, JP;
Denso Corporation, Kariya, JP;
Abstract
A semiconductor accelerometer device is formed on an SOI substrate by micro-machining. A movable unit is supported at both ends, and a weight portion is movable in response to acceleration exerted in the detection direction. A movable electrode is formed in a comb shape integrally with the weight portion. A pair of fixed electrodes in a comb shape are cantilevered and interleaved with the movable electrode to face the movable electrode. A plurality of through holes is provided in the electrodes so that the electrodes have Rahmen structure which is a series of rectangular frames. This structure reduces the weight of each electrode while increasing the strength against twist force. The electrodes are less likely from breaking in response to an acceleration exerted in a direction perpendicular to the normal detection direction because of reduced weight.