The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2000
Filed:
Aug. 04, 1999
Applicant:
Inventors:
Mengxiong Gong, San Marcos, CA (US);
Jason R Carlesi, San Diego, CA (US);
Michael C Binder, San Diego, CA (US);
Palash P Das, Vista, CA (US);
Assignee:
Cymer, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S / ;
U.S. Cl.
CPC ...
372 58 ; 372 59 ; 372 57 ;
Abstract
An excimer laser system with an automatic fluorine control system to permit precise control of the fluorine concentration within an F.sub.2 'sweet spot' in a gas discharge laser chamber. This is done with a computer control system which monitors laser parameters, determines .DELTA.E/.DELTA.V, the change of pulse energy with voltage, and automatically and precisely controls the fluorine concentration based on .DELTA.E/.DELTA.V without the need to actually measure the fluorine concentration.