The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2000
Filed:
Mar. 10, 1999
Yuzo Tasaki, Tokyo, JP;
Mamoru Satoh, Tokyo, JP;
Atsushi Onoe, Saitama-ken, JP;
Ayako Yoshida, Saitama-ken, JP;
Kiyofumi Chikuma, Saitama-ken, JP;
Dowa Mining Co., Ltd., Tokyo, JP;
Pioneer Electronic Corporation, Tokyo, JP;
Abstract
When a potassium-containing substance is formed in to a film using an organic potassium complex as a potassium source by the CVD method, it is prevented that the film formation rate is changed with the lapse of time, and the potassium content in the film thus formed is changed. As a potassium source for vaporization used for depositing the potassium-containing substance on a substrate by the CVD method, a .beta.-diketone complex of potassium that has been melted by heating to a temperature higher than its melting point and then cooled to be solidified is used.