The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2000
Filed:
Sep. 03, 1999
Kuo-Hsien Cheng, Hsin Chu, TW;
Ting-Chun Wang, Tao-Yan, TW;
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Abstract
A process for fabricating a tungsten plug, in a deep, small diameter opening, featuring a novel adhesive-barrier composite layer, located along the sides of the deep, small diameter opening, has been developed. The process features the use of a first titanium nitride barrier layer, deposited on an underlying titanium adhesive layer, via chemical vapor deposition procedures, used to enhance the conformality properties of the first titanium nitride barrier layer. A second titanium nitride barrier layer is then deposited, via plasma vapor deposition procedures, protecting the underlying CVD titanium nitride layer from the environment, while providing an improved surface for subsequent nucleation of a CVD tungsten layer.