The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2000
Filed:
Jul. 01, 1998
Applicant:
Inventor:
Tatsuya Iwasaki, Kumamoto, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B25J / ; B65G / ;
U.S. Cl.
CPC ...
4147443 ; 414941 ; 901 39 ;
Abstract
A substrate transferring apparatus comprising support members for supporting a substrate, and a drive mechanism for moving the support members to transfer the substrate, wherein the support members each have a pair of outer support segments for supporting an outer periphery of the substrate and a pair of inner support segment provided between the outer support segments.
Quick Actions:
Iwasaki, Tatsuya. (2000). Substrate transferring apparatus and substrate processing apparatus (U.S. Patent No. 6146083). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6146083
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile