The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2000
Filed:
Apr. 05, 1999
Applicant:
Inventor:
Yen-Lin Ding, Hsinchu, TW;
Assignee:
United Semiconductor Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438253 ; 438254 ;
Abstract
A method for manufacturing a dual-cylinder bottom electrode. Because the node contact hole is formed by self-aligned etching and the materials of the spacers are conductive materials, the node contact hole is smaller than the resolution of the photolithography. Hence, the size of the device can be greatly reduced. Furthermore, because of the dual-cylinder bottom electrode, the surface area of the bottom electrode is enlarged in a limited space. Therefore, the capacitance of the capacitor is increased.