The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Jun. 24, 1997
Daniel Kennedy, San Jose, CA (US);
Boris Fuksshimov, San Jose, CA (US);
Victor Belitsky, Sunnyvale, CA (US);
Boris Fishkin, San Carlos, CA (US);
Kyle Brown, Sunnyvale, CA (US);
Tom Osterheld, Mountain View, CA (US);
Jeff Beeler, Campbell, CA (US);
Ginetto Addiego, Berkeley, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.