The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Sep. 23, 1999
Applicant:
Inventor:
Gert-Jan Snijders, Amersfoort, NL;
Assignee:
ASM International N.V., Bilthoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; F27D / ; B65B / ;
U.S. Cl.
CPC ...
414160 ; 414940 ; 432241 ; 454187 ;
Abstract
System for treating wafers. It is proposed to place a number of furnaces in one area and wafer racks filled with wafers are introduced into each of these furnaces. The wafer racks are located in trolleys which are filled from cassettes in a central loading/removal device. The central loading/removal device serves for all furnaces.
Published as:
NL1005625C2; WO9843283A1; AU6526298A; EP0970510A1; US6139239A; KR20010005697A; TW434175B; JP2001519095A; EP0970510B1; DE69824562D1; DE69824562T2; JP2009027187A; JP4801711B2;