The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2000
Filed:
Nov. 19, 1998
Tokyo Electron Limited, Tokyo, JP;
Abstract
An ultrasonic cleaning apparatus has an intermediate tank having a space divided into a liquid storing region (2a) and a liquid recovering region (2b) by a partition plate (5). An ultrasonic unit (3) is disposed in the bottom of the liquid storing region (2a). A vibration propagating liquid, such as pure water, is contained in the liquid storing region (2a) and a lower part of a cleaning tank (1) is immersed in the vibration propagating liquid stored in the liquid storing region (2a). The partition plate (5) is provided in its upper edge (5c) with a plurality of V-shaped notches (9). A nozzle pipe (4) provided with a plurality of nozzle holes (4a) is disposed in a side of the liquid storing region (2a) opposite a side in which the partition plate (5) is disposed. Pure water jetted by the nozzle pipe (4) toward the outer surface (1a) of the bottom wall of the cleaning tank (1) flows along the outer surface (1a) and overflows the partition plate (5) into the liquid recovering region (2b).