The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2000
Filed:
May. 12, 1999
Applicant:
Inventors:
Chun-Huang Chen, Chia-I, TW;
Tien-Jui Liu, Tai-Chung, TW;
Assignee:
United Microelectronics Corp., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
392416 ; 219390 ; 118724 ; 432250 ;
Abstract
A furnace tube with quartz plug is configured to have an oxidation performed therein, and at least one elongated protruding portion with an opening on one side of the tube. The furnace also includes a quartz plug with a portion thereof inserted inside the elongated protruding portion, and with another portion thereof inserted into the tube. Accordingly, water resided in a gap between inner surface of the elongated protruding portion and outer surface of the quartz plug can be evaporated by self-heating of the quartz plug.