The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2000
Filed:
Sep. 08, 1998
Applicant:
Inventors:
Gabriel Y Sirat, Jerusalem, IL;
Yann Malet, Saint-Cyr l'Ecole, FR;
Assignee:
Optimet, Optical Metrology Ltd., Jerusalem, IL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356376 ; 356372 ; 356364 ; 356369 ;
Abstract
A method and apparatus for inspecting a three dimensional structure, such as an electronic component, using collimated light for accurately measuring the three-dimensional structure of members protruding above the surface of the component. Collimated light illuminates the surface, and spherical or other three-dimensional structure on the surface is analyzed, using stereoscopic, holographic, Moire, or conoscopic analysis of light reflected or scattered by the structure, using an array of optical detectors in a detector plane.