The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2000
Filed:
Jun. 23, 1998
Applicant:
Inventor:
Hiroyuki Iwai, Sagamihara, JP;
Assignee:
Tokyo Electron Limited, , US;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65B / ;
U.S. Cl.
CPC ...
414416 ; 414222 ; 414937 ;
Abstract
A substrate transferring apparatus 8 for taking out a semiconductor substrate W to be processed housed in a container 6 from within the container 6 comprises support plates 9 and a positional error correcting member 23 on each support plate. Each support plate 9 has a base portion and is to be inserted into the container 6 to take out the substrate W. The positional error correcting member 23 is provided at the base portion of the support plate 9. The member 23 is to abut a part of the substrate W projecting out of the container 6 and to push back the substrate W into the container 6 when the support plate 9 is inserted into the container 6.