The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2000
Filed:
Jan. 26, 1999
Applicant:
Inventors:
Tomoya Ogawa, Tokyo, JP;
Nobuhito Nango, Tokyo, JP;
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
3562374 ; 3562375 ; 3562391 ; 356318 ; 356417 ;
Abstract
A defect detecting method and a defect detecting device are provided. An image is formed by scattered light and emitted light from a specimen when a laser beam enters the specimen, and the image is then divided into a plurality of images of different wavelength bands, so that defects can be detected from the plurality of picked up images. Also, scattered light and emitted light incident upon a single objective lens system are divided into a plurality of different wavelength bands and picked up as a plurality of images. The plurality of images of the plurality of different wavelength bands are then combined and displayed in different colors.