The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2000
Filed:
May. 15, 1998
Applicant:
Inventor:
Tetsu Osawa, Sagamihara, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ; F21V / ; H01J / ;
U.S. Cl.
CPC ...
359868 ; 313113 ; 362298 ;
Abstract
A light source device has a first mirror for reflecting light emitted by a light source, and a second mirror for reflecting the light reflected by the first mirror and guiding the reflected light toward the irradiation target portion. The first mirror has a curved reflection surface having an elliptic or parabolic shape in section along the optical axis direction. The light source is set at the position of a focal point of the elliptic or parabolic shape of the curved reflection surface. The second mirror has a linear reflection surface which has a linear shape in section along the optical axis direction and faces the curved reflection surface of the first mirror.