The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2000
Filed:
Dec. 10, 1998
Kenichi Arai, Gunma-ken, JP;
Yoshihiro Kubota, Gunma-ken, JP;
Shin Etsu-Chemical Co., Ltd., Tokyo, JP;
Abstract
An electrostatic holding apparatus in which a voltage is applied to an conductive electrode covered with an insulating dielectric layer, in order to cause the insulating dielectric layer to electrostatically attract an object. The insulating dielectric layer is substantially formed of a sintered body produced by addition of 2.5-5 wt. % titania (TiO.sub.2) and 5 wt. % or less titanium nitride (TiN) powder to powder of a high resistivity ceramic having a volume resistivity of 1.times.10.sup.14 .OMEGA..multidot.cm or higher at 25.degree. C., followed by kneading, forming, and sintering. The sintered body has a volume resistivity of 1.times.10.sup.8 -8.times.10.sup.13 .OMEGA..multidot.cm at 25.degree. C. The volume resistivity of the insulating dielectric layer is decreased so as to increase an electrostatic attraction force, and an object can be removed at the time of stopping application of voltage. Further, the electrostatic holding apparatus does not generate impurities that would otherwise contaminate semiconductor devices. In addition, neither fine cracks nor pores remain, so that the electrostatic holding apparatus excellent in terms of withstand voltage.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile