The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2000
Filed:
Jul. 24, 1998
Applicant:
Inventor:
Tatsuya Iwasaki, Kumamoto, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414416 ; 414937 ; 901 16 ;
Abstract
A substrate transferring apparatus comprising a substrate support member for supporting a substrate, a base member for holding the substrate support member to be movable horizontally, a lifting member, having one end and another end, for holding the base member at the one end to be rotatable in a horizontal plane, the lifting member being movable upward and downward, and a hold-and-guide member for holding the lifting member at the another end and for guiding the lifting member when the lifting member is moved upward and downward.
Quick Actions:
Iwasaki, Tatsuya. (2000). Substrate transferring apparatus and substrate processing apparatus (U.S. Patent No. 6116841). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6116841
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile