The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2000
Filed:
Nov. 23, 1998
Paul C Colby, Sunnyvale, CA (US);
Electroglas, Inc., Santa Clara, CA (US);
Abstract
An apparatus and method for positioning a first stage relative to a second stage. An apparatus of the present invention comprises a motor system to move the first and second stages relative to each other and a motion control system to control the path of the stage being moved. One stage has a continuous surface with a continuous magnetizable region. Nonmagnetizable regions are uniformly patterned within the magnetizable region. A method of the present invention involves the construction of a stage by etching a plurality of though holes in a sheet and affixing the sheet to the top surface of a foundation. The present invention improves the accuracy and speed of a positioning stage.