The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2000
Filed:
Jan. 06, 1999
Thien T Nguyen, Austin, TX (US);
Mark I Gardner, Cedar Creek, TX (US);
Frederick N Hause, Austin, TX (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
An isolation structure and a method of making the same are provided. In one aspect, the method includes the steps of forming a trench in the substrate and a first insulating layer in the trench that has a bottom, a first sidewall and a second sidewall. Silicon nitride is deposited in the trench. Silicon nitride is removed from the bottom of the first insulating layer to establish a layer of silicon nitride on the first and second sidewalls by performing a first plasma etch of the deposited silicon nitride with an ambient containing He, SF.sub.6, and HBr, and a second plasma etch with an ambient containing He, SF.sub.6, and HBr. An insulating material is deposited in the trench. The method provides for reliable manufacture of nitride liners for trench isolation structures. Scaling is enhanced and the potential for parasitic leakage current due to liner oxide fracture or irregularity is reduced.